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Author Katamime Toshihisa, Iyechika Yasushi, Ono Yoshinobu, Takada Tomoyuki, Inui KatsumiDevice and method for the deposition of, in particular gb2312990a

Dec 12, 2006 · What is claimed is 1. A device for depositing in particular crystalline layers on one or more, in particular likewise crystalline substrates in a process chamber by means of reaction gases which are introduced into the process chamber where they react pyrolytically, the process chamber being disposed between a first wall and a second wall, which lies opposite the first, and the first wall gb2312990aDevice and method for the deposition of, in particular gb2312990aDec 12, 2006 · What is claimed is 1. A device for depositing in particular crystalline layers on one or more, in particular likewise crystalline substrates in a process chamber by means of reaction gases which are introduced into the process chamber where they react pyrolytically, the process chamber being disposed between a first wall and a second wall, which lies opposite the first, and the first wall gb2312990a

GB2312990A - MOVPE apparatus - Google Patents

GB2312990A GB9709505A GB9709505A GB2312990A GB 2312990 A GB2312990 A GB 2312990A GB 9709505 A GB9709505 A GB 9709505A GB 9709505 A GB9709505 A GB 9709505A GB 2312990 A GB2312990 A GB 2312990A Authority GB United Kingdom Prior art keywords compound semiconductor production device metallic member layer Prior art date 1996-05-10 Legal status (The legal status is an GB2312990A - MOVPE apparatus - Google PatentsGB2312990A GB9709505A GB9709505A GB2312990A GB 2312990 A GB2312990 A GB 2312990A GB 9709505 A GB9709505 A GB 9709505A GB 9709505 A GB9709505 A GB 9709505A GB 2312990 A GB2312990 A GB 2312990A Authority GB United Kingdom Prior art keywords compound semiconductor production device metallic member layer Prior art date 1996-05-10 Legal status (The legal status is an GB2312990B - Device for production of compound gb2312990aGB2312990A (en GB9709505D0 (en Inventor Toshihisa Katamime Yasushi Iyechika Yoshinobu Ono Tomoyuki Takada Katsumi Inui Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Sumitomo Chemical Co Ltd Original Assignee Sumitomo gb2312990a

GB2312990B - Device for production of compound gb2312990a

GB2312990A (en GB9709505D0 (en Inventor Toshihisa Katamime Yasushi Iyechika Yoshinobu Ono Tomoyuki Takada Katsumi Inui Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Sumitomo Chemical Co Ltd Original Assignee Sumitomo gb2312990a

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